This series of Vacuum tempering furance consists of furnace body, vacuum system, water cooling system, inflation system, gas cooling system, electric control systme and furnace outer material car etc. It is mainly used for vacuum tempering of high-speed steel, alloy tool steel, mould steel, bearing steel, stainless steel and spedcial alloy matrial etc and also for recrystallization annealing and aging of nonferrous metal. The utmost vacuum degree can reach up to 6.67×10-3 Pa. It adopts micro positive pressure carrier gas heating to ensure furnace temperature uniformity.The electric control system has a high automation degree, which is stable and reliable and the furnace can realize fully automatic operation.